Magnetron Sputter

  • Tandem perovskite solar cell & Flexible Solar Cell

This system can complete continuous coating on flexible tape. It consists of sputtering chamber, winding system, rectangular magnetron target and power supply, sample heating system, etc.


KURT thermal evaporation system

  • Perovskite solar cells & other types of devices

Kurt thermal evaporation system meets the preparation of different metal sources through a multi-position crucible system. At the same time, the system uses a double-layer source structure and can also be used to grow organic materials.


Huiyu thermal evaporation system

  • Perovskite solar cells & other types of devices

       Huiyu Thermal Evaporation System meets the preparation of different metal sources through a multi-position crucible system. At the same time, the system uses a dual-cavity structure to separate the growth of metal materials and organic materials, reducing the impact of each other.